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Effect of antimony-doping on the oxygen segregation coefficient in silicon crystal growth

โœ Scribed by Xinming Huang; Kazutaka Terashima; Koji Izunome; Shigeyuki Kimura


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
359 KB
Volume
149
Category
Article
ISSN
0022-0248

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