✦ LIBER ✦

Behavior of hydrogen atoms in ultrahigh-frequency silane plasma

✍ Scribed by Takashima, Seigou; Hori, Masaru; Goto, Toshio; Yoneda, Katsumi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Self-Assembly in Silane/Hydrogen Plasmas

✍ Forero-Martinez, Nancy C.; Le, Ha-Linh Thi; Vach, Holger 📂 Article 📅 2013 🏛 Springer 🌐 English ⚖ 312 KB

Measurement of Si atom density in radio-

✍ Sakakibara, Masafumi; Hiramatsu, Mineo; Goto, Toshio 📂 Article 📅 1991 🏛 American Institute of Physics 🌐 English ⚖ 773 KB

Growth processes of particles in high fr

✍ Watanabe, Yukio 📂 Article 📅 1996 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 484 KB

Axial distributions of metastable atoms

✍ Benova, E.; Petrova, Ts.; Blagoev, A.; Zhelyazkov, I. 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 391 KB

The role of metastable atoms in argon-di

✍ Sansonnens, L; Howling, A A; Hollenstein, C; Dorier, J -L; Kroll, U 📂 Article 📅 1994 🏛 Institute of Physics 🌐 English ⚖ 497 KB

Effects of discharge frequency on plasma

✍ Samukawa, S.; Akashi, H. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 147 KB