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Measurement of Si atom density in radio-frequency silane plasma using ultraviolet absorption spectroscopy

✍ Scribed by Sakakibara, Masafumi; Hiramatsu, Mineo; Goto, Toshio

Book ID: 120460777
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 773 KB
Volume: 69
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.348514

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