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Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy

✍ Scribed by Tada, Shigekazu; Takashima, Seigou; Ito, Masafumi; Hori, Masaru; Goto, Toshio; Sakamoto, Yuichi

Book ID: 121215163
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 458 KB
Volume: 88
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1305559

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