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Behavior of germanium ion-implanted into SiO2near the bonding interface of a silicon-on-insulator structure

✍ Scribed by I. E. Tyschenko; M. Voelskow; A. G. Cherkov; V. P. Popov


Book ID
111443731
Publisher
Springer
Year
2007
Tongue
English
Weight
213 KB
Volume
41
Category
Article
ISSN
1063-7826

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