Nitrogen bonding configurations near the oxynitride/silicon interface after oxynitridation in N2O ambient of a thin SiO2 gate

✍ Scribed by F. Monforte; M. Camalleri; D. Calì; G. Currò; E. Fazio; F. Neri

• Book ID: 108210689
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 190 KB
• Volume: 47
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2007.01.037