The early oxynitridation stages of hydrogen-terminated (100) silicon after exposure to N2:N2O. Nitrogen bonding states

✍ Scribed by G.F. Cerofolini; C. Bongiorno; M. Camalleri; G.G. Condorelli; I.L. Fragalà; C. Galati; S. Lorenti; L. Renna; C. Spinella; O. Viscuso

• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 161 KB
• Volume: 75
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390101033