The early oxynitridation stages of hydrogen-terminated (100) silicon after exposure to N2:N2O. III. Initial conditions

✍ Scribed by G.F. Cerofolini; C. Galati; S. Lorenti; L. Renna; O. Viscuso; C. Bongiorno; V. Raineri; C. Spinella; G.G. Condorelli; I.L. Fragalà; A. Terrasi

• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 753 KB
• Volume: 77
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-002-1997-0