✦ LIBER ✦

Auger electron spectroscopy and electron energy loss spectroscopy studies of the formation of silicon nitride by implanting low energy nitrogen ions into silicon

✍ Scribed by N. Lieske; R. Hezel

Book ID: 107863885
Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 425 KB
Volume: 85
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90049-3

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