𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Auger electron spectroscopy analysis at the ultrasonically welded interface between alumina and aluminum

✍ Scribed by Takehiko Watanabe; Atsushi Yanagisawa; Shiro Sunaga

Book ID
107440328
Publisher
The Minerals, Metals & Materials Society
Year
2003
Tongue
English
Weight
650 KB
Volume
34
Category
Article
ISSN
1073-5623

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Surface analysis at the sidewalls of VLS
Surface analysis at the sidewalls of VLSI patternsβ€”limitations and capabilities of spatially resolved Auger electron spectroscopy
✍ W. HΓΆsler πŸ“‚ Article πŸ“… 1991 πŸ› John Wiley and Sons 🌐 English βš– 863 KB

## Abstract Spatially defined excitation by a confined primary electron beam is the basis of conventional scanning Auger microscopy. This method encounters a physical limitation in spatial resolution when it is used for the analysis of sidewall surface of micron‐ and submicron‐sized patterns on VLS