✦ LIBER ✦
Measurement of the interlayer between aluminum and silicon dioxide using ellipsometric, capacitance-voltage and auger electron spectroscopy techniques
✍ Scribed by G.A. Candela; K.F. Galloway; Y.M. Liu; J. Fine
- Book ID
- 107863982
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 605 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0040-6090
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