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Atomic layer epitaxy of InP using trimethylindium and tertiarybutylphosphine

โœ Scribed by N. Pan; J. Carter; S. Hein; D. Howe; L. Goldman; L. Kupferberg; S. Brierley; K.C. Hsieh


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
568 KB
Volume
225
Category
Article
ISSN
0040-6090

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