Atomic Layer Deposition of TiO 2 on Surface Modified Nanoporous Low- k Films

✍ Scribed by Levrau, Elisabeth; Devloo-Casier, Kilian; Dendooven, Jolien; Ludwig, Karl F.; Verdonck, Patrick; Meersschaut, Johan; Baklanov, Mikhail. R.; Detavernier, Christophe

• Book ID: 126681360
• Publisher: American Chemical Society
• Year: 2013
• Tongue: English
• Weight: 942 KB
• Volume: 29
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la4027738