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Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino)tantalum and either ammonia or monomethylhydrazine

✍ Scribed by Ziwen Fang; Helen C. Aspinall; Rajesh Odedra; Richard J. Potter

Book ID: 116629964
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 749 KB
Volume: 331
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2011.07.012

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