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Atomic layer deposition of rare-earth-based binary and ternary oxides for microelectronic applications

✍ Scribed by Wiemer, C; Lamagna, L; Fanciulli, M

Book ID
120160931
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
845 KB
Volume
27
Category
Article
ISSN
0268-1242

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