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Atomic Layer Deposition of Insulating Hafnium and Zirconium Nitrides

✍ Scribed by Becker, Jill S.; Kim, Esther; Gordon, Roy G.

Book ID
120039228
Publisher
American Chemical Society
Year
2004
Tongue
English
Weight
107 KB
Volume
16
Category
Article
ISSN
0897-4756

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