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Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone

✍ Scribed by Jandhyala, Srikar; Mordi, Greg; Lee, Bongki; Lee, Geunsik; Floresca, Carlo; Cha, Pil-Ryung; Ahn, Jinho; Wallace, Robert M.; Chabal, Yves J.; Kim, Moon J.

Book ID: 111937155
Publisher: American Chemical Society
Year: 2012
Tongue: English
Weight: 529 KB
Volume: 6
Category: Article
ISSN: 1936-0851
DOI: 10.1021/nn300167t

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