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Atomic-force-microscopy visualization of Si nanocrystals in SiO2thermal oxide using selective etching

✍ Scribed by M. S. Dunaevskii; J. J. Grob; A. G. Zabrodskii; R. Laiho; A. N. Titkov

Book ID: 110140364
Publisher: Springer
Year: 2004
Tongue: English
Weight: 256 KB
Volume: 38
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1823054

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