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Atmospheric Pressure Glow Discharge Deposition of Polysiloxane and SiO x Films

✍ Scribed by Ward, L. J.; Schofield, W. C. E.; Badyal, J. P. S.; Goodwin, A. J.; Merlin, P. J.


Book ID
120358890
Publisher
American Chemical Society
Year
2003
Tongue
English
Weight
111 KB
Volume
19
Category
Article
ISSN
0743-7463

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