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Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

✍ Scribed by Trunec, D; Navrátil, Z; Stahel, P; Zají ková, L; Bur íková, V; Cech, J


Book ID
120358335
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
357 KB
Volume
37
Category
Article
ISSN
0022-3727

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