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Assessment of plasma-grown oxides on Si:Ge substrates

โœ Scribed by S. Hall; J.F. Zhang; S. Taylor; W. Eccleston; P. Beahan; G.T. Tatlock; C.J. Gibbings; C. Smith; C. Tuppen


Book ID
103615273
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
315 KB
Volume
39
Category
Article
ISSN
0169-4332

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