Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry

✍ Scribed by Nečas, David; Ohlídal, Ivan; Franta, Daniel; Čudek, Vladimír; Ohlídal, Miloslav; Vodák, Jiří; Sládková, Lucia; Zajíčková, Lenka; Eliáš, Marek; Vižďa, František

• Book ID: 122146731
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 811 KB
• Volume: 571
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.12.036