✦ LIBER ✦

Argon ion beam voltages influence the microstructure of aluminum nitride films in a dual ion beam sputtering system

✍ Scribed by Hong-Ying Chen; Sheng Han; Han C. Shih

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 138 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.042

No coin nor oath required. For personal study only.

✦ Synopsis

Aluminum nitride (AlN) films, using a dual ion beam sputtering, were prepared over the argon ion beam voltage ranging from 800 to 1200 V at room temperature. The AlN films were (0 0 2) and (1 0 0) planes. Excepting for operating at 1000 V, the AlN films exhibited the (0 0 2) preferred orientation. The growth exponents ranged from 0.27 to 0.23 and decreased with increasing argon ion beam voltage. The concentration of aluminum was richer than that of nitrogen in the films at all argon ion beam voltages. The concentration of aluminum decreased markedly with increasing the texture coefficient of AlN(0 0 2) plane.

📜 SIMILAR VOLUMES

Effect of argon ion beam voltages on the

Effect of argon ion beam voltages on the microstructure of aluminum nitride films prepared at room temperature by a dual ion beam sputtering system

✍ Hong-Ying Chen; Sheng Han; Chih-Hsuan Cheng; Han C. Shih 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 262 KB

A comparison of the step coverage of alu

A comparison of the step coverage of aluminum coatings produced by two sputter magnetron systems and a dual-beam ion system

✍ J.K.G. Panitz; B.L. Draper; R.M. Curlee 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 699 KB

A new rapid technique for characterizing

A new rapid technique for characterizing microstructures of films produced by ion beams in the transmission electron microscope

✍ W.S. Sampath; P.J. Wilbur 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 721 KB

7210. Microstructural variations in alum

7210. Microstructural variations in aluminum oxide coatings deposited using a dual beam ion system: J K G Panitz et al,J Vac Sci Technol, A8, 1990, 1313–1317

📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 154 KB

Dual ion beam irradiation system interfa

Dual ion beam irradiation system interfaced with a transmission electron microscope and the observation of defect evolution in Ni during irradiation

✍ Nobuhiro Ishikawa; Kazuo Furuya 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 504 KB

908. To the problem of difference in com

908. To the problem of difference in composition of charged and neutral particles sputtered by argon ion beam from gallium arsenide: A G Koval et al, Zh. Tekh Fiz, 43 (8), 1973, 1753–1754 (in Russian)

📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 125 KB