✦ LIBER ✦
A comparison of the step coverage of aluminum coatings produced by two sputter magnetron systems and a dual-beam ion system
✍ Scribed by J.K.G. Panitz; B.L. Draper; R.M. Curlee
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 699 KB
- Volume
- 166
- Category
- Article
- ISSN
- 0040-6090
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