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Application of spectroscopic ellipsometry for real-time control of CdTe and HgCdTe growth in an OMCVD system

✍ Scribed by S. Dakshina Murthy; I. B. Bhat; B. Johs; S. Pittal; P. He

Book ID
112816284
Publisher
Springer US
Year
1995
Tongue
English
Weight
421 KB
Volume
24
Category
Article
ISSN
0361-5235

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## Abstract Real time spectroscopic ellipsometry (RTSE) has been applied to study the deposition of polycrystalline CdTe, CdS, and CdTe~1–__x__~ S__~x~__ thin films on crystalline silicon wafer substrates as well as the formation of CdS/CdTe and CdTe/CdS heterojunctions, all using a magnetron sputt