Application of real-time in situ spectroscopic ellipsometry and infrared spectroscopy for characterizing interface structure of a-Si:H layer

✍ Scribed by H. Fujiwara; Y. Toyoshima; M. Kondo; A. Matsuda

• Book ID: 108472188
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 157 KB
• Volume: 66
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/s0927-0248(00)00175-6