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Application of real-time spectroscopic ellipsometry for the development of low-temperature diamond film growth processes

✍ Scribed by Joungchel Lee; Byungyou Hong; R Messier; R.W Collins

Book ID
114086364
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
145 KB
Volume
313-314
Category
Article
ISSN
0040-6090

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## Abstract Real time spectroscopic ellipsometry (RTSE) has been applied to study the deposition of polycrystalline CdTe, CdS, and CdTe~1–__x__~ S__~x~__ thin films on crystalline silicon wafer substrates as well as the formation of CdS/CdTe and CdTe/CdS heterojunctions, all using a magnetron sputt