Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth

✍ Scribed by Lee, Joungchel; Rovira, P. I.; An, Ilsin; Collins, R. W.

• Book ID: 120416812
• Publisher: American Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 881 KB
• Volume: 69
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1148844