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Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry

โœ Scribed by A Amassian; P Desjardins; L Martinu


Book ID
113936430
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
215 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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