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Application of NRA to evaluation of boron implants in Si for shallow junctions

✍ Scribed by M. Suzuki; M. Tomita; A. Murakoshi

Book ID: 114165530
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 81 KB
Volume: 190
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)01259-9

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