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Application of e-beam nanolithography for absorber structuring of high resolution x-ray masks

✍ Scribed by C. Köhler; W. Brünger; Ch. Ehrlich; H. Huber; K. Reimer


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
402 KB
Volume
21
Category
Article
ISSN
0167-9317

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