✦ LIBER ✦
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
✍ Scribed by M.G. Rosenfield; S.A. Rishton; D.P. Kern; D.E. Seeger; C.A. Whiting
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 605 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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