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Application of a tuned Langmuir probe for the diagnostic study of radio frequency glow discharges: instrumentation and theory

✍ Scribed by Yuancai Ye; R.Kenneth Marcus

Book ID: 113375117
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 875 KB
Volume: 50
Category: Article
ISSN: 0584-8547
DOI: 10.1016/0584-8547(95)01321-5

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