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Anomalous Effect of Hydrogen Dilution on the Crystallinity of ICPCVD-Grown Silicon Thin Films at Very Low Temperature

✍ Scribed by A.J. Letha; F.M. Chan; H.L. Hwang

Book ID: 107455660
Publisher: Springer US
Year: 2009
Tongue: English
Weight: 511 KB
Volume: 39
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-009-0963-4

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