On the Possibility of Obtaining the Crystalline Phase in Amorphous Films of Silicon Carbide on Silicon at Low Temperatures

✍ Scribed by Berezhinskii, L. I. ;Vlaskina, S. I. ;Lyashenko, G. I. ;Rodionov, V. E.

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 310 KB
• Volume: 121
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211210250