✦ LIBER ✦
Compensation of decreased ion energy by increased hydrogen dilution in plasma deposition of thin film silicon solar cells at low substrate temperatures
✍ Scribed by A.D. Verkerk; M.M. de Jong; J.K. Rath; M. Brinza; R.E.I. Schropp; W.J. Goedheer; V.V. Krzhizhanovskaya; Y.E. Gorbachev; K.E. Orlov; E.M. Khilkevitch; A.S. Smirnov
- Book ID
- 108215614
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 199 KB
- Volume
- 159-160
- Category
- Article
- ISSN
- 0921-5107
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