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Effects of very high hydrogen dilution at low temperature on hydrogenated amorphous silicon germanium

✍ Scribed by Masaki Shima; Akira Terakawa; Masao Isomura; Hisao Haku; Makoto Tanaka; Kenichiro Wakisaka; Seiichi Kiyama; Shinya Tsuda

Book ID
117148905
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
107 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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High hydrogen dilution and low substrate
High hydrogen dilution and low substrate temperature cause columnar growth of hydrogenated amorphous silicon
✍ Bronsveld, Paula C. P. ;Mates, Tomas ;Fejfar, Antonin ;Kočka, Jan ;Rath, Jatind πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 357 KB

## Abstract Columnar growth was observed in the amorphous part of mixed phase layers deposited at very low substrate temperatures. The width of the columns and the layer thickness at which they are first distinguishable in a cross‐sectional transmission electron microscope (X‐TEM) image, about 120