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Light-induced effects in hydrogenated amorphous silicon films grown from high hydrogen dilution of silane

✍ Scribed by Jong-Hwan Yoon; Kee-Tae Lee

Book ID
117145425
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
91 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),