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Annealing effects when activating dopant atoms in ion-implanted diamond layers

✍ Scribed by Johan F. Prins

Book ID: 113282068
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 398 KB
Volume: 59-60
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95837-4

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