𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effect of annealing and oxide layer thickness on doping profile shape of “through-oxide” implanted P+ ions in textured silicon

✍ Scribed by M.S. El-Dessouki; R. Galloni


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
558 KB
Volume
1
Category
Article
ISSN
0960-1481

No coin nor oath required. For personal study only.