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Annealing and deposition effects of the chemical composition of silicon-rich nitride

✍ Scribed by K.N. Andersen; W.E. Svendsen; T. Stimpel-Lindner; T. Sulima; H. Baumgärtner

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 292 KB
Volume: 243
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.09.096

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