Modelling of the angular distribution of
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Wang Zhenxia; Luo Wenyun; Wang Chuanshan; Wang Wenmin
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Article
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1996
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Elsevier Science
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English
β 841 KB
A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture