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Single collision focusing and the angular distribution of sputtering from Zr(0001)

✍ Scribed by G.J Williams; B.V King

Book ID
114170939
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
277 KB
Volume
153
Category
Article
ISSN
0168-583X

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture