Angular distribution of intensity of reflected radiation investigations of the influence of CO2 laser treatment on optical properties of hydrogenated amorphous silicon

✍ Scribed by A. Grabowski; J. Jaglarz; M. Nowak

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 309 KB
• Volume: 30
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(98)00031-0

✦ Synopsis

Thin ®lms of hydrogenated amorphous silicon (a-Si:H) were annealed using CO 2 laser radiation (l = 10.6 mm). Changes of optical properties of the treated a-Si:H were investigated using optical transmittance spectroscopy and the angular distribution of intensity of re¯ected radiation (ADIRR). The CO 2 laser annealing in¯uences the spectral characteristics of the real part of refractive index n and absorption coecient a of light in a-Si:H. This treatment increases the n and a values as well as the Urbach energy of a-Si:H. Simultaneously it decreases the optical energy gap of this material. The changes of optical parameters at the interfaces of a-Si:H±glass substrate and a-Si:H±air were established.