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CW CO2 laser CVD of amorphous hydrogenated silicon (a-Si:H): influence of the deposition geometry

✍ Scribed by E. Golusda; R. Lange; K.-D. Lühmann; G. Mollekopf; M. Wacker; H. Stafast

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 272 KB
Volume: 54
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90012-m

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