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Anelastic properties of aluminium thin films on silicon cantilevers

✍ Scribed by U Harms; F Klose; H Neuhäuser; K Fricke; E Peiner; A Schlachetzki

Book ID: 117619239
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 283 KB
Volume: 310
Category: Article
ISSN: 0925-8388
DOI: 10.1016/s0925-8388(00)01016-1

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