Piezoresistive properties of polysilicon
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V.A. Gridchin; V.M. Lubimsky; M.P. Sarina
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Article
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1995
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Elsevier Science
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English
β 417 KB
A simple theoretical model for calculating the longitudinal, transverse and shear gauge factors of highly doped polycrystalline silicon films is presented. The calculation of the gauge factors is performed in terms of the elastoresistance and stiffness coefficients of monocrystalline silicon. The re