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Piezoresistive elements of polycrystalline semiconductor thin films

โœ Scribed by Yosiharu Onuma; Kiichi Kamimura; Y. Homma


Publisher
Elsevier Science
Year
1988
Weight
341 KB
Volume
13
Category
Article
ISSN
0250-6874

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An investigation into the structural, electrical and piezoresistive properties of \(\mathrm{SOI}\) (silicon-on-insulator) type structures is reported. The aim of our work is to evaluate how deposition and annealing conditions may change these properties. Various characterization experiments have bee