𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Analysis of the composition of Ti-based thin films deposited on silicon by means of self-ion assisted deposition

✍ Scribed by Tashlykov, I. S.; Zukowski, P. V.; Baraishuk, S. M.; Mikhalkovich, O. M.

Book ID
120981049
Publisher
Taylor and Francis Group
Year
2007
Tongue
English
Weight
209 KB
Volume
162
Category
Article
ISSN
1042-0150

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Optical and structural properties of sil
Optical and structural properties of silicon nitride thin films prepared by ion-assisted deposition
✍ Shih-Liang Ku; Cheng-Chung Lee πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 484 KB

Silicon nitride (SiN x ) films were prepared by ion-assisted deposition process. The films were analyzed by measurement of scanning electron microscopy (SEM), Fourier transform infrared spectrometry (FTIR), Xray photoelectron spectrometry, spectrophotometer, and ellipsometer measurements. The effect