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Analysis of sputter deposited and evaporated tantalum oxide layers on SiO2by SNMS, XPS, TDS and TRFA

✍ Scribed by K. -H. Müller; V. Rupertus; H. Oechsner; V. Scheuer; T. Tschudi

Book ID: 112376612
Publisher: Springer
Year: 1989
Tongue: English
Weight: 370 KB
Volume: 333
Category: Article
ISSN: 1618-2650
DOI: 10.1007/bf00572362

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